What does the electron gas consist of

Release time:2023-03-29

The gases used in the semiconductor industry are collectively referred to as electronic gases. According to its categories can be divided into pure gas, high purity gas and semiconductor special material gas three categories. Special material gas is mainly used for epitaxy, doping and etching processes; High purity gas is mainly used as dilution gas and carrier gas. Electron gas is an important branch of special gas. Electronic gas can be divided into electronic grade, LSI(large scale integrated circuit) grade, VLSI(very large scale integrated circuit) grade and ULSI(very large scale integrated circuit) grade according to the purity grade and use situation.

In recent years, with the rapid development of super large-scale integrated circuit, flat panel display, photovoltaic power generation and other industries, the market demand of electronic gas increases obviously, and the localization of electronic special gas is an inevitable trend. It is understood that China has made gratifying progress in localization: domestic high purity ammonia has changed the monopoly market pattern of foreign gas companies, high purity tetrafluorofluorocarbons "have a price and no goods" era has been declared to end, high purity hydrogen chloride has successfully opened the domestic market.

Electronic gases mainly include: germanane, ethyl borane, ethyl silane, hydrogen bromide, hydrogen selenide, silicon tetrachloride, carbon tetrafluoride, trihydrogen arsenide, trichlorosilane, boron trichloride, trifluoromethane, nitrogen trifluoride, chlorine gas, hydrogen chloride, hexafluoroethane, tungsten hexafluoride, sulfur hexafluoride, hydrogen sulfide, phosphoane, silane, hydrogen fluoride, deuterium gas, ammonia, electronic grade laughing gas, etc.

Among them, sulfur hexafluoride, electron grade laughing gas, hydrogen sulfide and phosphoane are used more.

keyword: What does the electron gas consist of